Measurement of mechanical resonance and losses in nanometer scale silicon wires

@article{Carr1999MeasurementOM,
  title={Measurement of mechanical resonance and losses in nanometer scale silicon wires},
  author={Dustin Carr and Stephane Evoy and Lidija Sekaric and Harold G. Craighead and Jeevak M Parpia},
  journal={Applied Physics Letters},
  year={1999},
  volume={75},
  pages={920-922},
  url={https://api.semanticscholar.org/CorpusID:40826391}
}
We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and… 
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15 References

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