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. 2019 May 18;14(1):168.
doi: 10.1186/s11671-019-2997-8.

Highly Sensitive and Stable SERS Substrate Fabricated by Co-sputtering and Atomic Layer Deposition

Guilin Yin  1   2 , Shiheng Bai  1   2 , Xinglong Tu  1 , Zheng Li  1   2 , Yanpeng Zhang  1   2 , Weiming Wang  3 , Jing Lu  4 , Dannong He  1   2
Affiliations

Highly Sensitive and Stable SERS Substrate Fabricated by Co-sputtering and Atomic Layer Deposition

Guilin Yin et al. Nanoscale Res Lett. .

Abstract

In this study, we develop a facile method to fabricate highly sensitive and stable surface-enhanced Raman scattering (SERS) substrate, which is realized by combining co-sputtering with atomic layer deposition technology. To accomplish the SERS substrate preparation, we firstly utilized co-sputtering silver and aluminum on glass slides to form uniform discontinuous Ag film by removing Al later, which acted as SERS active moiety and presented high sensitivity in glycerin detection. After coating an ultrathin TiO2 layer via atomic layer deposition (ALD), the samples could further enhance the Raman signal due to the chemical effect as well as the long-range effect of the enhanced electromagnetic field generated by the encapsulated Ag nanoparticles (NPs). Besides, the coated sample could maintain the significant enhancement in air condition for more than 30 days. The high stability is induced by TiO2 layer, which efficiently prevents Ag NPs from surface oxidation. This highly sensitive and stable SERS substrate might highlight the application of interface state investigation for exploring novel liquid lubricating materials.

Keywords: ALD; Ag nanoparticles; Co-sputtering; SERS; TiO2.

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Conflict of interest statement

The authors declare that they have no competing interests.

Figures

Fig. 1
Fig. 1
Scheme of highly sensitive SERS substrate fabricated by co-sputtering and atomic layer deposition on glass slides
Fig. 2
Fig. 2
The SERS spectra of glycerin collected on substrate prepared with different (Ag, Al) co-sputtering time (a, b) and power ratio (c, d) without TiO2 layer
Fig. 3
Fig. 3
SEM images of Ag NPs prepared on glass slides at 1:1 power rate with different (Ag, Al) co-sputtering time (a–c) indicated (30 s, 60 s, 90 s, respectively) and at 60 s with different (Ag, Al) power ratio (d–f) indicated (4:1, 2:1, 1:2 respectively)
Fig. 4
Fig. 4
a EDS characterization of the sample prepared by co-sputtering (Ag, Al) _targets for 60 s at 1:1 power rate. b UV-visible absorption spectrum of Ag NPs prepared with different co-sputtering time and power ratio
Fig. 5
Fig. 5
The SERS spectra of glycerin collected from a 10 random points on the substrate as soon as well-prepared. b The same position on the substrate after different time left in air condition
Fig. 6
Fig. 6
Comparison of SERS glycerin spectra collected from a uncoated Ag NPs on glass sides and coated with TiO2 of different thickness. b The substrate coated a 2-nm TiO2 film in different duration left in air condition
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